GaAs HBT wet etch process using reclaimed chemicals
نویسندگان
چکیده
Chemical costs can be a significant part of semiconductor manufacturing materials cost. True chemical cost consists of raw chemical price, handling expenses and disposal of used chemicals. Some of this usage can be cut back by recycling the chemicals for re-use. This paper describes the work done to establish the use of recycled chemical for etch processing during Gallium Arsenide Hetero-junction Bipolar Transistors (GaAs HBT) fabrication.
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